ULVAC Turbomolecular Pumps and Pumping Systems — Service, Commissioning, and Spare Parts
ULVAC turbomolecular pumps (TMPs) use high-speed rotating blades to transfer gas molecules from the vacuum side to the foreline. The UTM series covers pumping speeds from 70 L/s to over 3000 L/s. The YTP series covers packaged pumping systems combining a turbomolecular pump with a built-in or companion backing pump. All UTM and YTP series pumps require a compatible fore pump operating below a defined allowable foreline pressure — exceeding this limit will cause the TMP to slow down, overheat, or fail. Read the model designation and confirm the foreline pressure requirement before connecting any backing pump.
Safety notice: ULVAC turbomolecular pump rotors spin at speeds of 24,000 rpm or higher. Do not attempt to disassemble, adjust, or replace rotor components without factory training, specialized tooling, and a safe environment free from vibration, contamination, and static discharge. Rotor disassembly must only be performed by a qualified ULVAC service engineer. Users are responsible for ensuring the pump is fully stopped and power is isolated before any maintenance action on the pump body or piping connections.
UTM Series — Large-Bore Turbomolecular Pumps (Water-Cooled)
The UTM-FW and UTM-FH series are water-cooled high-throughput turbomolecular pumps with magnetic bearing (FW) and hybrid ceramic bearing (FH) options where applicable. The model designation encodes the inlet flange type and surface treatment. “FW” and “FH” suffix indicate bearing type; inlet flange is VG (ISO-K) or ISO (ISO-F) and size is encoded in the model sort. “W” in the middle code = water cooled; “MI” = magnetic levitation type.
UTM-FW / UTM-FH Series Model and Part Number Table
Part number tables for the full UTM series (350, 480, 800, 1001, 1400, 2300, 3301 sizes in both FW and FH bearing versions) are available on request. Contact us with your exact model designation, series, and serial number for part number confirmation.
Read the model designation as follows: UTM-[size]FW or UTM-[size]FH, where W = wide range / high throughput (magnetic bearing) and H = high back pressure / high compression (ceramic bearing). Inlet flange suffixes: -AV = VG (ISO-K) flange; -AF = ISO-F flange; -AW = large VG flange; -AG = large ISO-F flange. Surface treatment: standard (no suffix) or Ni-plated.
UTM Series — Compact Models
| Model | Inlet flange | Surface treatment | Cooling | Notes |
|---|---|---|---|---|
| UTM70B-AV | VG65 (ISO-K 63) | None | Air-cooled | Compact 70 L/s model |
| UTM70B-AK | ISO63-K | None | Air-cooled | — |
| UTM70B-AC | ICF114 | None | Air-cooled | — |
| UTM300B-AV | VG100 (ISO-K 100) | None | Air-cooled | 300 L/s compact |
| UTM300B-AK | ISO100-K | None | Air-cooled | — |
| UTM300B-AC | ICF152 | None | Air-cooled | — |
UTM Magnetic Levitation Series (UTM-MI)
| Model sort | Models available | Inlet options | Cooling |
|---|---|---|---|
| UTM1200A | UTM1200A-MI-AVWX, UTM1200A-MI-AFWX | VG150, ISO160F | Water cooled |
| UTM1600A | UTM1600A-MI-AVWX, -AFWX, -AWWX, -AGWX | VG200/VG250, ISO200F/ISO250F | Water cooled |
| UTM2300A | UTM2300A-MI-AVWX, UTM2300A-MI-AFWX | VG250, ISO250F | Water cooled |
| UTM3400A | UTM3400A-MI-AVWX, -AFWX, -AWWX | VG300/VG350, ISO320F | Water cooled |
YTP Series — Turbomolecular Pumping Systems
YTP packaged systems combine a turbomolecular pump with a compatible backing pump in a single unit. YTP-50M and YTP-300M are standard mobile configurations. YTP-50SA, YTP-300SA are scroll-backed configurations. YTP-50M-DRY and YTP-50SA-DRY indicate dry-backing-pump configurations. YTP70A and YTP70A-D are desktop configurations.
| Model sort | Backing pump type | Configuration |
|---|---|---|
| YTP-50M | Oil rotary | Mobile |
| YTP-50M-DRY | Dry | Mobile |
| YTP-50SA | Scroll | SA (semi-auto) |
| YTP-50SA-DRY | Dry scroll | SA |
| YTP-300M | Oil rotary | Mobile |
| YTP-300SA | Scroll | SA |
| YTP70A | Oil rotary | Desktop |
| YTP70A-D | Dry | Desktop |
For complete part number tables for all UTM-FW/FH series sizes and all YTP series configurations, contact us with your model designation, series, serial number, and current operating hours.
Installation Requirements
- Flange orientation: Most UTM series pumps require a specific mounting orientation. The inlet flange must face upward (pump below) in standard configuration. Horizontal or inverted mounting may be supported in specific models — confirm from the model-specific installation manual before mounting.
- Vibration and shock: The TMP rotor operates at high speed and is sensitive to external vibration and shock. Mount the pump on a vibration-isolated structure. Do not allow the pump to be impacted while running or while the rotor is still decelerating after shutdown.
- Backing pump: Connect a compatible fore pump with adequate pumping speed to maintain the allowable foreline pressure. Do not start the TMP until the backing pump has been running and the foreline pressure is confirmed below the specified limit.
- Cooling water (water-cooled models): Confirm cooling-water flow rate, inlet temperature, and outlet temperature before energizing the pump. Insufficient cooling will trigger a temperature interlock and shut down the pump.
- Purge gas (if fitted): Some UTM models support a purge-gas connection for use in aggressive process environments. Confirm the purge-gas line is connected and pressure-regulated before starting on a process with corrosive or condensable gases.
- Controller compatibility: Each UTM series pump requires a specific ULVAC controller or driver unit. The controller part number and cable must match the pump model. Do not connect a UTM pump to a controller intended for a different model series.
Commissioning Sequence
- Verify the model designation, controller compatibility, and cable connection before powering anything.
- Check that the cooling-water supply is on and flowing at the specified rate (water-cooled models).
- Start the backing pump and verify it reaches operating temperature and base pressure.
- Confirm the foreline pressure is below the TMP allowable foreline pressure before starting the TMP.
- Power up the TMP controller. The pump will begin to accelerate. Monitor current and vibration during acceleration.
- Allow the pump to reach operating speed. Check the controller display for normal speed, bearing condition, and temperature status.
- Measure the ultimate pressure at the inlet after the pump reaches operating speed and any outgassing settles.
- Verify the controller interlock outputs and alarm outputs are connected and functional.
- Record the final operating speed, foreline pressure, inlet pressure, and cooling-water temperature in the commissioning report.
Preventive Maintenance
- Monitor the run-hour counter in the controller and compare with the recommended bearing service interval.
- Check cooling-water flow and temperature at regular intervals.
- Check controller logs for bearing vibration or temperature trends.
- Inspect the backing-pump ultimate pressure regularly — a deteriorating backing pump will cause foreline pressure to rise and reduce TMP performance or trigger protection.
- Inspect the purge-gas system if fitted.
- Do not allow the pump to vent to atmosphere while running above a low idle speed. Always use the controller vent function or a slow-vent valve.
- Bearing replacement in magnetic levitation models requires factory service. For ceramic bearing models, bearing replacement requires a qualified workshop. Contact us with the model, serial number, and run hours to assess whether bearing service is due.
Common Symptoms and Diagnostic Guidance
| Symptom | Likely causes | Action |
|---|---|---|
| Pump fails to reach operating speed | High foreline pressure; excess gas load; rotor imbalance; bearing damage | Verify foreline pressure; check gas load; contact service with controller log. |
| High vibration alarm | Rotor contamination/imbalance; bearing wear; loose coupling to pump body | Stop the pump. Do not restart. Contact service immediately. |
| Temperature alarm | Insufficient cooling; blocked cooling-water path; high process gas load | Check cooling-water flow and temperature. Reduce process gas load if possible. |
| Cannot reach ultimate pressure | Vacuum leak on inlet side; contaminated rotor; backing pump deterioration; controller calibration | Perform inlet blank-off test. Measure foreline pressure. Contact service. |
| Pump does not start | Interlock signal missing; controller fault; bearing fault; power supply issue | Check all interlock inputs on the controller. Read error code from controller display or log. |
Service Scope
We provide: pre-installation consultation, installation supervision, cable verification, controller configuration, first-start commissioning, operating-speed and performance verification, foreline pressure testing, run-hour evaluation, bearing condition assessment, depot service for bearing replacement and rotor cleaning, and final performance testing. State the exact model, part number, serial number, operating hours, controller type, and description of the fault or service requirement when contacting us.
Enquire About Service or Parts
Email: mail@ulvacheliot.com
Provide: exact model designation, part number, serial number, operating hours, controller model, foreline pressure, inlet pressure, fault description or service requirement.
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