ULVAC Qulee Residual Gas Analysers and Process Gas Monitors
Overview
The ULVAC Qulee series provides quadrupole mass spectrometers and process gas monitors for residual gas analysis (RGA) and real-time vacuum process control. The Qulee instruments use internal differential pumping to allow operation from low-vacuum processes down to high-vacuum analytical conditions. All units connect via LAN using the Qulee_QCS software suite.
Operating Principle
A quadrupole mass spectrometer ionises gas molecules in an ion source, then separates ions by their mass-to-charge ratio (m/z) using four parallel rods driven by combined DC and RF voltages. At each RF/DC ratio only ions of a specific m/z pass through to the detector; scanning the ratio sweeps the mass spectrum. The ion source requires high vacuum (typically below 10−3 Pa) to prevent collisions and maintain a stable filament; the Qulee series achieves this with an integral differential pumping system — a small backing pump evacuates the ion source region regardless of the process pressure at the inlet orifice.
Differential Pumping Requirement
The Qulee BGM2 / HGM2 / CGM monitors sample gas through an orifice into an internally pumped ion source. The foreline connection (backing pump) must maintain sufficient flow to keep the ion source below its rated operating pressure. Verify foreline pressure is within specification before energising the filament. The YTP-H differential pumping kits are available for specific pressure ranges (see table below).
Filament Protection
The ion source incorporates automatic filament protection circuitry. If ion source pressure rises above the safe threshold — for example due to sudden venting or a pumping failure — the filament emission is shut off automatically to prevent burnout. Always ensure the backing pump is running and the system is at safe pressure before re-enabling the filament.
Mass Axis Calibration
Calibrate using the air background spectrum. Expected peaks in a clean, dry system on atmospheric leakage:
- m/z 14 — N fragment
- m/z 18 — H₂O (water)
- m/z 28 — N₂ (dominant air peak)
- m/z 32 — O₂
- m/z 40 — Ar
Adjust mass axis offset if peaks appear shifted by more than 0.1 amu. Record the calibration date and conditions.
Background Spectrum Interpretation
- m/z 18 — Water vapour: elevated after venting or exposure to atmosphere; falls with baking or pumping time
- m/z 44 — CO₂: may indicate outgassing or a minor air leak
- m/z >50 — Hydrocarbons: indicate contamination from pump oil backstreaming, solvents, or O-rings
Commissioning Sequence
- Verify foreline connection and confirm foreline pressure is within specification for the selected Qulee model
- Connect LAN cable between Qulee unit and PC; install Qulee_QCS software (English or Japanese version as required)
- Power up the Qulee unit and verify filament emission current stabilises within 60 seconds
- Acquire background mass spectrum (m/z 1–100) and verify air peaks are present at m/z 14, 18, 28, 32, 40
- Perform mass axis calibration if any peak is displaced more than 0.1 amu from expected position
- Configure monitoring channels (select masses to track) and set alarm thresholds for each channel
- Record baseline spectrum with all process parameters noted for future comparison
GP-H / GP-BH Detection Units (Pirani Sensor for RGA Inlet)
Pirani-type pressure sensing detection units for controlling the RGA inlet valve or interlock. GP-H is a direct sensor; GP-BH includes a convertor cable for compatibility with multiple WP-type gauge controllers.
| Part Number | Model | Specification | Origin |
|---|---|---|---|
| 210005150800 | GP-H | WP-01 type | Japan |
| 210005150900 | GP-H | WP-02 type | Japan |
| 210005151000 | GP-H | WP-03 type | Japan |
| 210005151200 | GP-H | WP-16 type | Japan |
| 210005151500 | GP-BH | With convertor cable 2 m | Japan |
| 210005151800 | GP-BH | Without convertor cable | Japan |
| 210006892700 | GP-BH | WP-01, WP-02, WP-03, WP-16 type — convertor cable 2 m | Japan |
| 210005151300 | GP-BH | WP-04 type — convertor cable 2 m | Japan |
| 210005151400 | GP-BH | WP-05 type — convertor cable 2 m | Japan |
Qulee BGM2 Basic Process Gas Monitor
The BGM2 series are compact, self-contained basic process gas monitors with quadrupole mass spectrometer and internal differential pumping. DC 24 V powered. LAN connection to Qulee_QCS software. Available in four models (BGM2-101, -102, -201, -202) covering different mass range and sensitivity combinations. SLV variants omit the LAN cable and software for integration into multi-sensor systems.
| Part Number | Model | Specification | Origin |
|---|---|---|---|
| 210006908600 | BGM2-101 | LAN cable 3 m, DC 24 V, with intermediate pipe, Japanese software | Japan |
| 210006908700 | BGM2-101 | LAN cable 3 m, DC 24 V, with intermediate pipe, English software | Japan |
| 210006908800 | BGM2-101 (SLV) | DC 24 V, with intermediate pipe, without LAN cable, without software | Japan |
| 210006908900 | BGM2-102 | LAN cable 3 m, DC 24 V, with intermediate pipe, Japanese software | Japan |
| 210006909000 | BGM2-102 | LAN cable 3 m, DC 24 V, with intermediate pipe, English software | Japan |
| 210006909100 | BGM2-102 (SLV) | DC 24 V, with intermediate pipe, without LAN cable, without software | Japan |
| 210006909200 | BGM2-201 | LAN cable 3 m, DC 24 V, with intermediate pipe, Japanese software | Japan |
| 210006909300 | BGM2-201 | LAN cable 3 m, DC 24 V, with intermediate pipe, English software | Japan |
| 210006909400 | BGM2-201 (SLV) | DC 24 V, with intermediate pipe, without LAN cable, without software | Japan |
| 210006909500 | BGM2-202 | LAN cable 3 m, DC 24 V, with intermediate pipe, Japanese software | Japan |
| 210006909600 | BGM2-202 | LAN cable 3 m, DC 24 V, with intermediate pipe, English software | Japan |
| 210006909700 | BGM2-202 (SLV) | DC 24 V, with intermediate pipe, without LAN cable, without software | Japan |
Qulee HGM2 High Performance Process Gas Monitor
The HGM2-202 and HGM2-302 are high-performance process gas monitors with extended mass range and higher sensitivity compared to the BGM2 series. Suitable for demanding process monitoring applications requiring detection of heavier species or lower concentrations.
| Part Number | Model | Specification | Origin |
|---|---|---|---|
| 210006909800 | HGM2-202 | LAN cable 3 m, DC 24 V, with intermediate pipe, Japanese software | Japan |
| 210006909900 | HGM2-202 | LAN cable 3 m, DC 24 V, with intermediate pipe, English software | Japan |
| 210006910000 | HGM2-202 (SLV) | DC 24 V, with intermediate pipe, without LAN cable, without software | Japan |
| 210006910100 | HGM2-302 | LAN cable 3 m, DC 24 V, with intermediate pipe, Japanese software | Japan |
| 210006910200 | HGM2-302 | LAN cable 3 m, DC 24 V, with intermediate pipe, English software | Japan |
| 210006910300 | HGM2-302 (SLV) | DC 24 V, with intermediate pipe, without LAN cable, without software | Japan |
Qulee CGM Compact Process Gas Monitor
The CGM-051 and CGM-052 are compact process gas monitors available in Pa, Torr, and mbar pressure units. Options include QIP-PG (quadrupole ion pump controller integration) and 485-SLV variant (RS-485 interface for multi-sensor systems, without communication cable and software).
| Part Number | Model | Specification | Pressure Unit | Origin |
|---|---|---|---|---|
| 210006175800 | CGM-051 | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Pa | Japan |
| 210006290100 | CGM-051 QIP-PG | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Pa | Japan |
| 210006290700 | CGM-051 (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Pa | Japan |
| 210006291300 | CGM-051 QIP-PG (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Pa | Japan |
| 210006289600 | CGM-051 | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Torr | Japan |
| 210006290300 | CGM-051 QIP-PG | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Torr | Japan |
| 210006290800 | CGM-051 (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Torr | Japan |
| 210006291400 | CGM-051 QIP-PG (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Torr | Japan |
| 210006289700 | CGM-051 | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | mbar | Japan |
| 210006290500 | CGM-051 QIP-PG | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | mbar | Japan |
| 210006290900 | CGM-051 (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | mbar | Japan |
| 210006291500 | CGM-051 QIP-PG (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | mbar | Japan |
| 210006176000 | CGM-052 | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Pa | Japan |
| 210006290200 | CGM-052 QIP-PG | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Pa | Japan |
| 210006291000 | CGM-052 (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Pa | Japan |
| 210006291600 | CGM-052 QIP-PG (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Pa | Japan |
| 210006289800 | CGM-052 | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Torr | Japan |
| 210006290400 | CGM-052 QIP-PG | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | Torr | Japan |
| 210006291100 | CGM-052 (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Torr | Japan |
| 210006291700 | CGM-052 QIP-PG (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | Torr | Japan |
| 210006289900 | CGM-052 | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | mbar | Japan |
| 210006290600 | CGM-052 QIP-PG | Communication cable 3 m, DC 24 V, with intermediate pipe, English software | mbar | Japan |
| 210006291200 | CGM-052 (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | mbar | Japan |
| 210006291800 | CGM-052 QIP-PG (485-SLV) | For Multisensor, without communication cable, DC 24 V, with intermediate pipe, without software | mbar | Japan |
Qulee RGM Reactive Process Gas Monitor
The RGM-202 and RGM-302 are designed for reactive gas monitoring at elevated process pressures. They use orifice-based differential sampling; orifice diameter determines the pressure range.
| Part Number | Model | Orifice | Pressure Range | Weight (kg) | Origin |
|---|---|---|---|---|---|
| 210006434500 | RGM-202 | φ 1.0 mm | 5–100 Pa | 95 | Japan |
| 210006434600 | RGM-202 | φ 0.4 mm | 50–500 Pa | 95 | Japan |
| 210006434700 | RGM-202 | φ 0.1 mm | 50–1,300 Pa | 95 | Japan |
| 210006434800 | RGM-202 | φ 0.05 mm | 5,000–13,000 Pa | 95 | Japan |
| 210006434900 | RGM-302 | φ 1.0 mm | 5–100 Pa | 95 | Japan |
| 210006435000 | RGM-302 | φ 0.4 mm | 50–500 Pa | 95 | Japan |
| 210006435100 | RGM-302 | φ 0.1 mm | 50–1,300 Pa | 95 | Japan |
| 210006435200 | RGM-302 | φ 0.05 mm | 5,000–13,000 Pa | 95 | Japan |
Qulee with YTP-H Differential Pumping Kits
Complete quadrupole mass spectrometer systems with differential pumping kit for atmospheric or elevated process pressure monitoring. Specify pressure range and language (Japanese/English) and power supply (AC 100 V / AC 200 V for atmospheric models).
| Part Number | Configuration | Pressure | Language / Power | Weight (kg) |
|---|---|---|---|---|
| 210006918700 | BGM-101, DRP | Atmospheric | Japanese, AC 100 V | 50 |
| 210006918800 | BGM-102, DRP | Atmospheric | Japanese, AC 100 V | 50 |
| 210006918900 | BGM-201, DRP | Atmospheric | Japanese, AC 100 V | 50 |
| 210006919000 | BGM-202, DRP | Atmospheric | Japanese, AC 100 V | 50 |
| 210006919100 | HGM-302, DRP | Atmospheric | Japanese, AC 100 V | 50 |
| 210006921700 | BGM-101, DRP | Atmospheric | English, AC 100 V | 50 |
| 210006921800 | BGM-102, DRP | Atmospheric | English, AC 100 V | 50 |
| 210006921900 | BGM-201, DRP | Atmospheric | English, AC 100 V | 50 |
| 210006922000 | BGM-202, DRP | Atmospheric | English, AC 100 V | 50 |
| 210006922100 | HGM-302, DRP | Atmospheric | English, AC 100 V | 50 |
| 210006945700 | BGM-101, DRP | Atmospheric | Japanese, AC 200 V | 50 |
| 210006945800 | BGM-102, DRP | Atmospheric | Japanese, AC 200 V | 50 |
| 210006945900 | BGM-201, DRP | Atmospheric | Japanese, AC 200 V | 50 |
| 210006946000 | BGM-202, DRP | Atmospheric | Japanese, AC 200 V | 50 |
| 210006946100 | HGM-302, DRP | Atmospheric | Japanese, AC 200 V | 50 |
| 210006946200 | BGM-101, DRP | Atmospheric | English, AC 200 V | 50 |
| 210006946300 | BGM-102, DRP | Atmospheric | English, AC 200 V | 50 |
| 210006946400 | BGM-201, DRP | Atmospheric | English, AC 200 V | 50 |
| 210006946500 | BGM-202, DRP | Atmospheric | English, AC 200 V | 50 |
| 210006946600 | HGM-302, DRP | Atmospheric | English, AC 200 V | 50 |
| 210006919200 | BGM2-101, DRP | 3,000 Pa | Japanese | 29 |
| 210006919300 | BGM2-102, DRP | 3,000 Pa | Japanese | 29 |
| 210006919400 | BGM2-201, DRP | 3,000 Pa | Japanese | 29 |
| 210006919500 | BGM2-202, DRP | 3,000 Pa | Japanese | 29 |
| 210006919600 | HGM2-302, DRP | 3,000 Pa | Japanese | 30 |
| 210006922200 | BGM2-101, DRP | 3,000 Pa | English/Japanese | 29 |
| 210006922300 | BGM2-102, DRP | 3,000 Pa | English | 29 |
| 210006922400 | BGM2-201, DRP | 3,000 Pa | English | 29 |
| 210006922500 | BGM2-202, DRP | 3,000 Pa | English | 29 |
| 210006922600 | HGM2-302, DRP | 3,000 Pa | English | 30 |
| 210006919700 | BGM2-101, DRP | 500 Pa | Japanese | 29 |
| 210006919800 | BGM2-102, DRP | 500 Pa | Japanese | 29 |
| 210006919900 | BGM2-201, DRP | 500 Pa | Japanese | 29 |
| 210006920000 | BGM2-202, DRP | 500 Pa | Japanese | 29 |
| 210006920100 | HGM2-302, DRP | 500 Pa | Japanese | 30 |
| 210006922700 | BGM2-101, DRP | 500 Pa | English | 29 |
| 210006922800 | BGM2-102, DRP | 500 Pa | English | 29 |
| 210006922900 | BGM2-201, DRP | 500 Pa | English | 29 |
| 210006923000 | BGM2-202, DRP | 500 Pa | English | 29 |
| 210006923100 | HGM2-302, DRP | 500 Pa | English | 30 |
| 210006920200 | BGM2-101, DRP | 100 Pa | Japanese | 29 |
| 210006920300 | BGM2-102, DRP | 100 Pa | Japanese | 29 |
| 210006920400 | BGM2-201, DRP | 100 Pa | Japanese | 29 |
| 210006920500 | BGM2-202, DRP | 100 Pa | Japanese | 29 |
| 210006920600 | HGM2-302, DRP | 100 Pa | Japanese | 30 |
| 210006923200 | BGM2-101, DRP | 100 Pa | English | 29 |
| 210006923300 | BGM2-102, DRP | 100 Pa | English | 29 |
| 210006923400 | BGM2-201, DRP | 100 Pa | English | 29 |
| 210006923500 | BGM2-202, DRP | 100 Pa | English | 29 |
| 210006923600 | HGM2-302, DRP | 100 Pa | English | 30 |
| 210006920700 | BGM2-101, DRP | 10 Pa | Japanese | 29 |
| 210006920800 | BGM2-102, DRP | 10 Pa | Japanese | 29 |
| 210006920900 | BGM2-201, DRP | 10 Pa | Japanese | 29 |
| 210006921000 | BGM2-202, DRP | 10 Pa | Japanese | 29 |
| 210006921100 | HGM2-302, DRP | 10 Pa | Japanese | 30 |
| 210006923700 | BGM2-101, DRP | 10 Pa | English | 29 |
| 210006923800 | BGM2-102, DRP | 10 Pa | English | 29 |
| 210006923900 | BGM2-201, DRP | 10 Pa | English | 29 |
| 210006924000 | BGM2-202, DRP | 10 Pa | English | 29 |
| 210006924100 | HGM2-302, DRP | 10 Pa | English | 30 |
| 210006921200 | BGM2-101, DRP | 1 Pa | Japanese | 29 |
| 210006921300 | BGM2-102, DRP | 1 Pa | Japanese | 29 |
| 210006921400 | BGM2-201, DRP | 1 Pa | Japanese | 29 |
| 210006921500 | BGM2-202, DRP | 1 Pa | Japanese | 29 |
| 210006921600 | HGM2-302, DRP | 1 Pa | Japanese | 30 |
| 210006924200 | BGM2-101, DRP | 1 Pa | English | 29 |
| 210006924300 | BGM2-102, DRP | 1 Pa | English | 29 |
| 210006924400 | BGM2-201, DRP | 1 Pa | English | 29 |
| 210006924500 | BGM2-202, DRP | 1 Pa | English | 29 |
| 210006924600 | HGM2-302, DRP | 1 Pa | English | 30 |
Qulee_QCS Software — Ver.4 (Ethernet)
| Part Number | Model | Language | QIP Option | Interface |
|---|---|---|---|---|
| 200002006800 | Qulee_QCS Ver.4 | Japanese | No | Ethernet |
| 200002006900 | Qulee_QCS Ver.4 | English | No | Ethernet |
| 200002007000 | Qulee_QCS Ver.4 | Japanese | QIP | Ethernet |
| 200002007100 | Qulee_QCS Ver.4 | English | QIP | Ethernet |
Qulee_QCS Software — Ver.3
| Part Number | Model | Language | QIP Option | Pressure Unit |
|---|---|---|---|---|
| 200001896400 | Qulee_QCS Ver.3 | English | No | Pa |
| 200006949500 | Qulee_QCS Ver.3 | English | No | Torr |
| 200006949600 | Qulee_QCS Ver.3 | English | No | mbar |
| 200006949400 | Qulee_QCS Ver.3 | English | QIP | Pa |
| 200006949700 | Qulee_QCS Ver.3 | English | QIP | Torr |
| 200006949800 | Qulee_QCS Ver.3 | English | QIP | mbar |
Accessories and Replacement Parts
| Part Number | Model | Description | Compatibility |
|---|---|---|---|
| 210006176100 | CGM-AN51 | Analyzer tube | CGM-051 |
| 210006176200 | CGM-AN52 | Analyzer tube | CGM-052 |
| 210006176400 | CGM-EM01 | SEM (secondary electron multiplier) | CGM-AN02 |
| 210006176900 | BGM-AN101/201 | Analyzer tube | BGM-101/201 |
| 210006177000 | BGM-AN102/202 | Analyzer tube | BGM-102/202 |
| 210006177200 | BGM-EM01 | SEM (secondary electron multiplier) | BGM-AN02 |
| 210006401600 | HGM-AN202 | Analyzer tube | HGM-202/302 |
| 210006401800 | QFL-001 | Filament repair kit | HGM-202/302 |
| 210006435300 | RGM-AN202/302 | Analyzer tube | RGM-202/302 |
| 210006442900 | QEM-001 | SEM (secondary electron multiplier) | RGM-202/203, HGM-202/203 |
| 210004081300 | QFL-002 | Filament for REPROS | REPROS |
| 210004084700 | Filament | Replacement filament | MSQ-150A/200/ST-200 |
| 210004084800 | Filament | Replacement filament | MSQ-400/ST-400 |
| 210004085300 | SEM | Secondary electron multiplier | MSQ-150A/200/ST-200 |
| 210006406700 | ZSC-02 | Analyzer tube unit cable — 2 m | Power supply unit to analyzer unit |
| 210006406800 | ZSC-05 | Analyzer tube unit cable — 5 m | Power supply unit to analyzer unit |
| 210006406900 | ZSC-10 | Analyzer tube unit cable — 10 m | Power supply unit to analyzer unit |