ULVAC Spectroscopic Ellipsometers and Optical Process Monitors
ULVAC spectroscopic ellipsometers (UNECS series) and the Optius OPM optical process monitor measure thin-film thickness and optical constants using polarized light. These instruments are used for in-situ or ex-situ measurement of thin films deposited by PVD, CVD, ALD, and other deposition processes. Spectroscopic ellipsometry provides simultaneous measurement of film thickness and refractive index across a wavelength range. The Optius OPM is an optical film-thickness monitor for in-situ deposition monitoring.
Model and Part Number Table
| Part Number | Model | Specification |
|---|---|---|
| 210006803500 | Optius Main unit TSC | 1ch Optius Software with QCS w/o addition ESC |
| 210006803600 | Optius Main unit TSC | 2ch Optius Software with QCS addition ESC×1 |
| 210006803700 | Optius Main unit TSC | 3ch Optius Software with QCS addition ESC×2 |
| 210006803800 | Optius Main unit TSC | 4ch Optius Software with QCS addition ESC×3 |
| 210006803900 | Optius Main unit TSC | 5ch Optius Software with QCS addition ESC×4 |
| 210006804000 | Vacuum light receiving unit VSM | for Vacuum,Collimate lens,Optical fiber(XSR 2m),inlet port(XSR,KF16) |
| 210006804100 | Atmosphere light receiving unit ASM | for Atmosphere,light receiving unit,Optical fiber(XSR 2m) |
| 210006804200 | Expansion unit ESC | channes extension unit 1ch |
| 210006804300 | Dedicated software OCS | for Optius |
| 210006834900 | UNECS-Portable | Wave length 530-750nm,Spot size 1mm､fixed stage､English､100-220V |
| 210006835100 | UNECS-Portable-030 | Wave length 530-750nm,Spot size 0.3mm､fixed stage､English､100-220V |
| 210006835300 | UNECS-Portable-W | Wave length 380-760nm,Spot size 1mm､fixed stage､English､100-115V |
| 210006835400 | UNECS-Portable-W | Wave length 380-760nm,Spot size 1mm､fixed stage､English､220V |
| 210006835600 | UNECS-Portable-W-030 | Wave length 380-760nm,Spot size 0.3mm､fixed stage､English､100-115V |
| 210006835700 | UNECS-Portable-W-030 | Wave length 380-760nm,Spot size 0.3mm､fixed stage､English､220V |
| 210006835900 | UNECS-1500M | Wave length 530-750nm,Spot size 1mm､150mm､ Manual stage､English､100-220V |
| 210006836100 | UNECS-1500M-030 | Wave length 530-750nm,Spot size 0.3 mm､150mm､ Manual stage､English､100-220V |
| 210006836300 | UNECS-1500MW | Wave length 380-760nm,Spot size 1mm､150mm､ Manual stage､English､100-115V |
| 210006836400 | UNECS-1500MW | Wave length 380-760nm,Spot size 1mm､150mm､ Manual stage､English､220V |
| 210006836600 | UNECS-1500MW-030 | Wave length 380-760nm,Spot size 0.3mm､150mm､ Manual stage､English､100-115V |
| 210006836700 | UNECS-1500MW-030 | Wave length 380-760nm,Spot size 0.3mm､150mm､ Manual stage､English､220V |
| 210006836900 | UNECS-1500A | Wave length 530-750nm,Spot size 1mm､150mm Auto stage､English､100-115V |
| 210006837000 | UNECS-1500A | Wave length 530-750nm,Spot size 1mm､150mm Auto stage､English､220V |
| 210006837200 | UNECS-1500A-030 | Wave length 530-750nm,Spot size 0.3mm､150mm Auto stage､English､100-115V |
| 210006837300 | UNECS-1500A-030 | Wave length 530-750nm,Spot size 0.3mm､150mm Auto stage､English､220V |
| 210006837500 | UNECS-1500AW | Wave length 380-760nm,Spot size 1mm､150mm Auto stage､English､100-115V |
| 210006837600 | UNECS-1500AW | Wave length 380-760nm,Spot size 1mm､150mm Auto stage､English､220V |
| 210006837800 | UNECS-1500AW-030 | Wave length 380-760nm,Spot size 0.3mm､150mm Auto stage､English､100-115V |
| 210006837900 | UNECS-1500AW-030 | Wave length 380-760nm,Spot size 0.3mm､150mm Auto stage､English､220V |
| 210006838100 | UNECS-2000A | Wave length 530-750nm,Spot size 1mm､200mm Auto stage､English､100-115V |
| 210006838200 | UNECS-2000A | Wave length 530-750nm,Spot size 1mm､200mm Auto stage､English､220V |
| 210006838400 | UNECS-2000A-030 | Wave length 530-750nm,Spot size 0.3mm､200mm Auto stage､English､100-115V |
| 210006838500 | UNECS-2000A-030 | Wave length 530-750nm,Spot size 0.3mm､200mm Auto stage､English､220V |
| 210006838700 | UNECS-2000AW | Wave length 380-760nm,Spot size 1mm､200mm Auto stage､English､100-115V |
| 210006838800 | UNECS-2000AW | Wave length 380-760nm,Spot size 1mm､200mm Auto stage､English､220V |
| 210006839000 | UNECS-2000AW-030 | Wave length 380-760nm,Spot size 0.3mm､200mm Auto stage､English､100-115V |
| 210006839100 | UNECS-2000AW-030 | Wave length 380-760nm,Spot size 0.3mm､200mm Auto stage､English､220V |
| 210006839300 | UNECS-3000A | Wave length 530-750nm,Spot size 1mm､300mm Auto stage､English､100-115V |
| 210006839400 | UNECS-3000A | Wave length 530-750nm,Spot size 1mm､300mm Auto stage､English､220V |
| 210006839600 | UNECS-3000A-030 | Wave length 530-750nm,Spot size 0.3mm､300mm Auto stage､Emglish､100-115V |
| 210006839700 | UNECS-3000A-030 | Wave length 530-750nm,Spot size 0.3mm､300mm Auto stage､English､220V |
| 210006839900 | UNECS-3000AW | Wave length 380-760nm,Spot size 1mm､300mm Auto stage､English､100-115V |
| 210006840000 | UNECS-3000AW | Wave length 380-760nm,Spot size 1mm､300mm Auto stage､English､220V |
| 210006840200 | UNECS-3000AW-030 | Wave length 380-760nm,Spot size 0.3mm､300mm Auto stage､English､100-115V |
| 210006840300 | UNECS-3000AW-030 | Wave length 380-760nm,Spot size 0.3mm､300mm Auto stage､English､220V |
| 210006840400 | UNECS-1M | Built-in type for Atmosphere,Wave length530-750nm,Spot size1mm､w/o PC, Domestic,100-220V |
| 210006840500 | UNECS-1M | Built-in type for Atmosphere,Wave length530-750nm,Spot size1mm､w/o PC, Overseas,100-220V |
| 210006840600 | UNECS-1M-030 | Built-in type for Atmosphere,Wave length530-750nm,Spot size0.3mm､w/o PC, Domestic,100-220V |
| 210006840700 | UNECS-1M-030 | Built-in type for Atmosphere,Wave length530-750nm,Spot size0.3mm､w/o PC, Overseas,100-220V |
| 210006840800 | UNECS-1MW | Built-in type for Atmosphere,Wave length380-760nm,Spot size1mm､w/o PC, Domestic,100-220V |
| 210006840900 | UNECS-1MW | Built-in type for Atmosphere,Wave length380-760nm,Spot size1mm､w/o PC, Overseas,100-220V |
| 210006841000 | UNECS-1MW | Built-in type for Atmosphere,Wave length380-760nm,Spot size1mm､w/o PC, Overseas,220V |
| 210006841100 | UNECS-1MW-030 | Built-in type for Atmosphere,Wave length380-760nm,Spot size 0.3mm､w/o PC, Domestic,100-115V |
| 210006841200 | UNECS-1MW-030 | Built-in type for Atmosphere,Wave length380-760nm,Spot size 0.3mm､w/o PC, Overseas,100-115V |
| 210006841300 | UNECS-1MW-030 | Built-in type for Atmosphere,Wave length380-760nm,Spot size 0.3mm､w/o PC, Overseas,220V |
| 210006841400 | UNECS-1MV | Built-in type for Vacuum,Wave length530-750nm,Spot size1mm､w/o PC, Domestic,100-220V |
| 210006841500 | UNECS-1MV | Built-in type for Vacuum,Wave length530-750nm,Spot size1mm､w/o PC, Overseas,100-220V |
| 210006841600 | UNECS-1MVW | Built-in type for Vacuum,Wave length380-760nm,Spot size 1mm､w/o PC, Domestic,100-115V |
| 210006841700 | UNECS-1MVW | Built-in type for Vacuum,Wave length380-760nm,Spot size 1mm､w/o PC, Overseas,100-115V |
| 210006841800 | UNECS-1MVW | Built-in type for Vacuum,Wave length380-760nm,Spot size 1mm､w/o PC, Overseas,220V |
Installation and Commissioning
- Confirm optical-head orientation and sample position before installation.
- Allow the light source to stabilize before calibration or measurement.
- Perform calibration using the supplied reference standard. Do not substitute a different reference without recalculating the system calibration constants.
- Confirm software version compatibility with the hardware and operating system before installation.
- For in-situ configurations, confirm that the optical windows are correctly specified for the process environment and that the installation does not introduce a vacuum leak.
Service Enquiry
Email: mail@ulvacheliot.com
Provide: model, part number, serial number, measurement objective, current symptom or service requirement.