ULVAC Vacuum Fittings, Pipes, Flanges, and Feedthroughs
ULVAC vacuum fittings, piping components, and feedthroughs are designed for clean vacuum system construction. Components include inlet flange adaptors, blank flanges, flexible hoses, bellows joints, inlet pipes, flanges with gauge ports, intermediate pipes, tee pipes, angle pipes, cross pipes, gauge ports, rotary and linear motion feedthroughs, and current feedthrough terminals. Confirm the connection standard (VF, KF/NW, UFC, JIS) and seal material (Viton/FKM or NBR) before ordering.
Inlet Flange Adaptors and Blank Flanges
| Part Number | Model | Specification |
|---|---|---|
| 200009439900 | LS300 ISO-KF | |
| 200009440000 | LS300 JIS | |
| 200009440100 | LS600 ISO-KF | |
| 200009440200 | LS600 JIS | |
| 200009440300 | LS1200 ISO-KF | |
| 200009440400 | LS1200 JIS | |
| 210004829200 | KFF-16 | NW16, SUS304 |
| 210004829200 | KFF-16 | NW16, SUS304 |
Flexible Hoses
Stainless-steel flexible hoses provide vibration isolation and allow small positional misalignment. Do not exceed the specified compression, extension, or lateral-offset limits. Do not allow the hose to rotate during assembly.
| Part Number | Model | Specification |
|---|---|---|
| 210004829700 | KFH-16-1000 | Stainless steel, NW16, 1000mm, w/o mesh |
| 210004560400 | KFH-25-1000 | Stainless steel, NW25, 1000mm, w/o mesh |
| 210004830100 | KFH-40-1000 | Stainless steel, NW40, 1000mm, w/o mesh |
| 6W2643500000 | CFH-070-1000 | Stainless steel, UFC070, 1000mm, w/o mesh |
| 210004829700 | KFH-16-1000 | Stainless steel, NW16, 1000mm, w/o mesh |
| 210004560400 | KFH-25-1000 | Stainless steel, NW25, 1000mm, w/o mesh |
| 210004830100 | KFH-40-1000 | Stainless steel, NW40, 1000mm, w/o mesh |
| 6W2643500000 | CFH-070-1000 | Stainless steel, UFC070, 1000mm, w/o mesh |
Bellows Joints
| Part Number | Model | Specification |
|---|---|---|
| 210004211800 | BJ-25A | Stainless steel, Gasket, Viton |
| 210004211900 | BJ-40A | Stainless steel, Gasket, Viton |
| 210004212000 | BJ-50A | Stainless steel, Gasket, Viton |
| 210004212100 | BJ-80A | Stainless steel, Gasket, Viton |
| 210004212200 | BJ-100A | Stainless steel, Gasket, Viton |
| 210004212300 | BJ-150A | Stainless steel, Gasket, Viton |
Inlet Pipes
| Part Number | Model | Specification |
|---|---|---|
| 210004207200 | RF-1 | Stainless steel, Gasket, Viton |
| 210004207300 | RF-2 | Stainless steel, Gasket, Viton, TMX-1 |
| 210004207400 | RF-3 | Stainless steel, Gasket, Viton |
| 210004207500 | RF-4 | Stainless steel, Gasket, Viton |
| 210004207600 | RF-5 | Stainless steel, Gasket, Viton, TMX-1 |
| 210004207700 | RF-6 | Stainless steel, Gasket, Viton, TMX-1 |
| 210004208400 | VF20 X 15A | Stainless steel, VF20 x 15A |
| 210004208500 | VF20 X 20A | Stainless steel, VF20 x 20A |
| 210004208600 | VF20 X 25A | Stainless steel, VF20 x 25A |
| 210004208700 | VF25 X 15A | Stainless steel, VF25 x 15A |
| 210004208800 | VF25 X 20A | Stainless steel, VF25 x 20A |
| 210004208900 | VF25 X 25A | Stainless steel, VF25 x 25A |
| 210004209000 | VF40 X 15A | Stainless steel, VF40 x 15A |
| 210004209100 | VF40 X 20A | Stainless steel, VF40 x 20A |
| 210004209200 | VF40 X 25A | Stainless steel, VF40 x 25A |
| 210004209300 | VF50 X 15A | Stainless steel, VF50 x 15A |
| 210004209400 | VF50 X 20A | Stainless steel, VF50 x 20A |
| 210004209500 | VF50 X 25A | Stainless steel, VF50 x 25A |
Flanges with Inlet Pipe
| Part Number | Model | Specification |
|---|---|---|
| 210004208400 | VF20 X 15A | Stainless steel, VF20 x 15A |
| 210004208500 | VF20 X 20A | Stainless steel, VF20 x 20A |
| 210004208600 | VF20 X 25A | Stainless steel, VF20 x 25A |
| 210004208700 | VF25 X 15A | Stainless steel, VF25 x 15A |
| 210004208800 | VF25 X 20A | Stainless steel, VF25 x 20A |
| 210004208900 | VF25 X 25A | Stainless steel, VF25 x 25A |
| 210004209000 | VF40 X 15A | Stainless steel, VF40 x 15A |
| 210004209100 | VF40 X 20A | Stainless steel, VF40 x 20A |
| 210004209200 | VF40 X 25A | Stainless steel, VF40 x 25A |
| 210004209300 | VF50 X 15A | Stainless steel, VF50 x 15A |
| 210004209400 | VF50 X 20A | Stainless steel, VF50 x 20A |
| 210004209500 | VF50 X 25A | Stainless steel, VF50 x 25A |
Flanges with Gauge Ports and Short Pipes
| Part Number | Model | Specification |
|---|---|---|
| 210004212400 | GF-20 | Stainless steel, Gasket, Viton |
| 210004212500 | GF-25 | Stainless steel, Gasket, Viton |
| 210004212600 | GF-40 | Stainless steel, Gasket, Viton |
| 210004212700 | GF-50 | Stainless steel, Gasket, Viton |
| 210004212800 | GF-80 | Stainless steel, Gasket, Viton |
| 210004212900 | GF-100 | Stainless steel, Gasket, Viton |
| 210004209600 | TP-20 | Stainless steel, Viton |
| 210004209700 | TP-25 | Stainless steel, Gasket, Viton |
| 210004209800 | TP-40 | Stainless steel, Gasket, Viton |
| 210004209900 | TP-50 | Stainless steel, Gasket, Viton |
| 6W1020700000 | PG-φ15 (Stainless steel made) | w/O-ring, Viton |
| 6W1011000000 | PG-φ18 (Soft steel made) | w/O-ring, NBR |
| 6W1021000000 | PG-φ15 (Soft steel made) | w/O-ring, NBR |
Intermediate, Tee, Angle, and Cross Pipes
| Part Number | Model | Specification |
|---|---|---|
| 210004829700 | KFH-16-1000 | Stainless steel, NW16, 1000mm, w/o mesh |
| 210004560400 | KFH-25-1000 | Stainless steel, NW25, 1000mm, w/o mesh |
| 210004830100 | KFH-40-1000 | Stainless steel, NW40, 1000mm, w/o mesh |
| 210004207200 | RF-1 | Stainless steel, Gasket, Viton |
| 210004207300 | RF-2 | Stainless steel, Gasket, Viton, TMX-1 |
| 210004207400 | RF-3 | Stainless steel, Gasket, Viton |
| 210004207500 | RF-4 | Stainless steel, Gasket, Viton |
| 210004207600 | RF-5 | Stainless steel, Gasket, Viton, TMX-1 |
| 210004207700 | RF-6 | Stainless steel, Gasket, Viton, TMX-1 |
| 210004208400 | VF20 X 15A | Stainless steel, VF20 x 15A |
| 210004208500 | VF20 X 20A | Stainless steel, VF20 x 20A |
| 210004208600 | VF20 X 25A | Stainless steel, VF20 x 25A |
| 210004208700 | VF25 X 15A | Stainless steel, VF25 x 15A |
| 210004208800 | VF25 X 20A | Stainless steel, VF25 x 20A |
| 210004208900 | VF25 X 25A | Stainless steel, VF25 x 25A |
| 210004209000 | VF40 X 15A | Stainless steel, VF40 x 15A |
| 210004209100 | VF40 X 20A | Stainless steel, VF40 x 20A |
| 210004209200 | VF40 X 25A | Stainless steel, VF40 x 25A |
| 210004209300 | VF50 X 15A | Stainless steel, VF50 x 15A |
| 210004209400 | VF50 X 20A | Stainless steel, VF50 x 20A |
| 210004209500 | VF50 X 25A | Stainless steel, VF50 x 25A |
| 210004212400 | GF-20 | Stainless steel, Gasket, Viton |
| 210004212500 | GF-25 | Stainless steel, Gasket, Viton |
| 210004212600 | GF-40 | Stainless steel, Gasket, Viton |
| 210004212700 | GF-50 | Stainless steel, Gasket, Viton |
| 210004212800 | GF-80 | Stainless steel, Gasket, Viton |
| 210004212900 | GF-100 | Stainless steel, Gasket, Viton |
| 210004209600 | TP-20 | Stainless steel, Viton |
| 210004209700 | TP-25 | Stainless steel, Gasket, Viton |
| 210004209800 | TP-40 | Stainless steel, Gasket, Viton |
| 210004209900 | TP-50 | Stainless steel, Gasket, Viton |
| 210004210800 | I-VF20XVG20 | Stainless steel, Gasket, Viton |
| 210004210900 | I-VF20XVG25 | Stainless steel, Gasket, Viton |
| 210004211000 | I-VF20XVG40 | Stainless steel, Gasket, Viton |
| 210004211100 | I-VF20XVG50 | Stainless steel, Gasket, Viton |
| 210004211200 | I-VF25XVG25 | Stainless steel, Gasket, Viton |
| 210004211300 | I-VF25XVG40 | Stainless steel, Gasket, Viton |
| 210004211400 | I-VF25XVG50 | Stainless steel, Gasket, Viton |
| 210004211500 | I-VF40XVG40 | Stainless steel, Gasket, Viton |
| 210004211600 | I-VF40XVG50 | Stainless steel, Gasket, Viton |
| 210004211700 | I-VF40XVG50 | Stainless steel, Gasket, Viton |
| 210004210000 | T-20 | Stainless steel, Gasket, Viton |
| 210004210100 | T-25 | Stainless steel, Gasket, Viton |
| 210004210200 | T-40 | Stainless steel, Gasket, Viton |
| 210004210300 | T-50 | Stainless steel, Gasket, Viton |
| 210004210400 | L-20 | Stainless steel, Gasket, Viton |
| 210004210500 | L-25 | Stainless steel, Gasket, Viton |
| 210004210600 | L-40 | Stainless steel, Gasket, Viton |
| 210004210700 | L-50 | Stainless steel, Gasket, Viton |
| 210004211800 | BJ-25A | Stainless steel, Gasket, Viton |
| 210004211900 | BJ-40A | Stainless steel, Gasket, Viton |
| 210004212000 | BJ-50A | Stainless steel, Gasket, Viton |
| 210004212100 | BJ-80A | Stainless steel, Gasket, Viton |
| 210004212200 | BJ-100A | Stainless steel, Gasket, Viton |
| 210004212300 | BJ-150A | Stainless steel, Gasket, Viton |
| 6W2643500000 | CFH-070-1000 | Stainless steel, UFC070, 1000mm, w/o mesh |
| 6W1020700000 | PG-φ15 (Stainless steel made) | w/O-ring, Viton |
| 6W1011000000 | PG-φ18 (Soft steel made) | w/O-ring, NBR |
| 6W1021000000 | PG-φ15 (Soft steel made) | w/O-ring, NBR |
| 210006460900 | MCK7016 | |
| 210006461000 | MCK8016 | |
| 210006294700 | C70-NW16 | UFC070-NW16 |
| 210006294800 | C70-NW25 | UFC070-NW25 |
| 210006294900 | C70-NW40 | UFC070-NW40 |
| 210004829700 | KFH-16-1000 | Stainless steel, NW16, 1000mm, w/o mesh |
| 210004560400 | KFH-25-1000 | Stainless steel, NW25, 1000mm, w/o mesh |
| 210004830100 | KFH-40-1000 | Stainless steel, NW40, 1000mm, w/o mesh |
| 6W2643500000 | CFH-070-1000 | Stainless steel, UFC070, 1000mm, w/o mesh |
| 200001898100 | CGM-TU01 | for CGM-AN01, CGM-AN02 |
| 200001898200 | BGM-TU01 | for BGM-101R |
| 200001898300 | BGM-TU02 | for BGM-102R |
| 200007244500 | HGM-TU02 | for HGM-202/302 |
| 210006409100 | P-C7 | Stainless steel, NW16-NW16-NW16-NW16 |
Rotary and Linear Motion Feedthroughs
Rotary feedthroughs (TDU series) allow shaft rotation through the vacuum wall. Linear feedthroughs (TSU series) allow axial movement. Confirm the flange connection (UFC-034 or UFC-070) and stroke or rotation range before ordering.
| Part Number | Model | Specification |
|---|---|---|
| 210004529800 | TDU-08F | w/UFC-070 |
| 210004529900 | TDU-08FS | w/UFC-070, Long life type |
| 210004530000 | TDU-04FM | w/UFC-034 |
| 210004530100 | TSU-15FM | w/UFC-034 |
| 210004530200 | TSU-15F | w/UFC-070 |
| 210004530300 | TSU-40F | w/UFC-070 |
Current Feedthrough Terminals (CMS Series)
CMS series feedthrough terminals pass electrical current through the vacuum wall. Configurations from 1P to 8P, current ratings from 2A (CMS2D) to 16A (CMS16D). Available with UFC-034, UFC-070, or VF-40 flanges, or as electrode poles only for user-supplied flanges. Confirm pin count, current rating, and flange connection when ordering.
| Part Number | Model | Specification |
|---|---|---|
| 210004530400 | CMS2D09-1P | Electrode pole w/insulator and seat plate |
| 210004530500 | CMS2D09-1P | Electrode pole w/insulator, seat plate and pipe |
| 210004530600 | CMS2D09-1P | Electrode pole w/insulator |
| 210004530700 | CMS2D09-4P | Electrode pole w/insulator and seat plate |
| 210004530800 | CMS2D09-4P | Electrode pole w/insulator, seat plate and pipe |
| 210004530900 | CMS2D09-8P | Electrode pole w/insulator and seat plate |
| 210004531000 | CMS2D09-8P | Electrode pole w/insulator, seat plate and pipe |
| 210004531100 | CMS5D20-1P | Electrode pole w/insulator and seat plate |
| 210004531200 | CMS5D20-1P | Electrode pole w/insulator, seat plate and pipe |
| 210004531300 | CMS5D20-1P | Electrode pole w/insulator |
| 210004531400 | CMS5D20-3P | Electrode pole w/insulator and seat plate |
| 210004531500 | CMS5D20-3P | Electrode pole w/insulator, seat plate and pipe |
| 210004531600 | CMS10D20-1P | Electrode pole w/insulator and seat plate |
| 210004531700 | CMS10D20-1P | Electrode pole w/insulator, seat plate and pipe |
| 210004531800 | CMS10D20-1P | Electrode pole w/insulator |
| 210004531900 | CMS16D20-1P | Electrode pole w/insulator and seat plate |
| 210004532000 | CMS16D20-1P | Electrode pole w/insulator, seat plate and pipe |
| 210004532100 | CMS16D20-1P | Electrode pole w/insulator |
| 210004532200 | CMS5D80-1P | Electrode pole w/insulator and seat plate |
| 210004532300 | CMS5D80-1P | Electrode pole w/insulator, seat plate and pipe |
| 210004532400 | CMS5D80-1P | Electrode pole w/insulator |
| 210004532500 | CMS10D80-1P | Electrode pole w/insulator and seat plate |
| 210004532600 | CMS10D80-1P | Electrode pole w/insulator, seat plate and pipe |
| 210004532700 | CMS10D80-1P | Electrode pole w/insulator |
| 210004532800 | CMS2D09-1PF | w/UFC-070 |
| 210004532900 | CMS2D09-1PF | w/UVF-40 |
| 210004533000 | CMS2D09-4PF | w/UFC-070FH |
| 210004533100 | CMS2D09-4PF | w/UVF-40 |
| 210004533200 | CMS2D09-8PF | w/UFC-070FH |
| 210004533300 | CMS2D09-8PF | w/UVF-40 |
| 210004533400 | CMS5D20-1PF | w/UFC-070FH |
| 210004533500 | CMS5D20-1PF | w/UVF-40 |
| 210004533600 | CMS5D20-3PF | w/UFC-070FH |
| 210004533700 | CMS5D20-3PF | w/UVF-40 |
| 210004533800 | CMS10D20-1PF | w/UFC-070FH |
| 210004533900 | CMS10D20-1PF | w/UVF-40 |
| 210004534000 | CMS16D20-1PF | w/UFC-070FH |
| 210004534100 | CMS16D20-1PF | w/UVF-40 |
| 210004534200 | CMS5D80-1PF | w/UFC-070FH |
| 210004534300 | CMS5D80-1PF | w/UVF-40 |
| 210004534400 | CMS10D80-1PF | w/UFC-070FH |
| 210004534500 | CMS10D80-1PF | w/UVF-40 |
| 210004534600 | CMS1DTMC-2PFM | w/UFC-034FH |
| 210004534700 | CMS2DBNC-1PFM | w/UFC-034FH |
| 210004534800 | CMS2D09-1PFM | w/UFC-034FH |
| 210004534900 | CMS2D09-2PFM | w/UFC-034FH |
| 210004535000 | CMS5D20-1PFM | w/UFC-034FH |
| 210004535100 | CMS5D80-1PFM | w/UFC-034FH |
Service Enquiry
Email: mail@ulvacheliot.com
Provide: model, part number, connection standard, pipe size, and application.