ULVAC Dry Vacuum Pumps — Service, Commissioning, and Spare Parts
ULVAC dry vacuum pumps cover four confirmed technology families in the ULVAC Components catalog: multi-stage dry screw pumps (LS series), dry scroll pumps (CR series), multi-stage dry Roots pumps (LR, HR, UR, GR series), and diaphragm pumps (MD1). All families are oil-free in the pumping chamber — no pumping-chamber oil contamination is transferred to the process. Each family has different operating principles, utility requirements, and service procedures. Read the model designation and specification carefully before ordering a replacement or scheduling service.
Model Designation and Part Number Reference
LS Series — Multi-Stage Dry Screw Pumps
The LS series uses a multi-stage screw compression mechanism with oil-free pumping chambers. Seal material is FKM (standard) or FFKM (perfluoroelastomer, for aggressive process gases). Two inlet-flange configurations exist: C type and L type. Confirm the type from the installation drawing before ordering a replacement unit.
| Part number | Model | Pump size | Type | Seal | Voltage | Net weight (kg) |
|---|---|---|---|---|---|---|
| 210006903500 | LS120A-C-21-00000 | LS120 | C | FKM | 200 V | 142 |
| 210006903600 | LS120A-C-22-00000 | LS120 | C | FKM | 400 V | 142 |
| 210006903700 | LS120A-L-21-00000 | LS120 | L | FKM | 200 V | 142 |
| 210006903800 | LS120A-L-22-00000 | LS120 | L | FKM | 400 V | 142 |
| 210006905400 | LS120A-L-41-00000 | LS120 | L | FFKM | 200 V | 142 |
| 210006905500 | LS120A-L-42-00000 | LS120 | L | FFKM | 400 V | 142 |
| 210006903900 | LS300A-C-21-00000 | LS300 | C | FKM | 200 V | 220 |
| 210006904000 | LS300A-C-22-00000 | LS300 | C | FKM | 400 V | 220 |
| 210006904100 | LS300A-L-21-00000 | LS300 | L | FKM | 200 V | 220 |
| 210006904200 | LS300A-L-22-00000 | LS300 | L | FKM | 400 V | 220 |
| 210006905600 | LS300A-L-41-00000 | LS300 | L | FFKM | 200 V | 220 |
| 210006905700 | LS300A-L-42-00000 | LS300 | L | FFKM | 400 V | 220 |
| 210006904300 | LS600A-C-21-00000 | LS600 | C | FKM | 200 V | 242 |
| 210006904400 | LS600A-C-22-00000 | LS600 | C | FKM | 400 V | 242 |
| 210006904500 | LS600A-L-21-00000 | LS600 | L | FKM | 200 V | 242 |
| 210006904600 | LS600A-L-22-00000 | LS600 | L | FKM | 400 V | 242 |
| 210006905800 | LS600A-L-41-00000 | LS600 | L | FFKM | 200 V | 242 |
| 210006905900 | LS600A-L-42-00000 | LS600 | L | FFKM | 400 V | 242 |
| 210006904700 | LS1200A-C-21-00000 | LS1200 | C | FKM | 200 V | 266 |
| 210006904800 | LS1200A-C-22-00000 | LS1200 | C | FKM | 400 V | 266 |
| 210006904900 | LS1200A-L-21-00000 | LS1200 | L | FKM | 200 V | 266 |
| 210006905000 | LS1200A-L-22-00000 | LS1200 | L | FKM | 400 V | 266 |
| 210006906000 | LS1200A-L-41-00000 | LS1200 | L | FFKM | 200 V | 266 |
| 210006906100 | LS1200A-L-42-00000 | LS1200 | L | FFKM | 400 V | 266 |
CR Series — Dry Scroll Pumps
The CR series uses a scroll compression mechanism. These are single-stage, compact, and relatively quiet compared with multi-stage Roots pumps of similar displacement. CR16B and CR30B accept single-phase or three-phase 100–240 V supply. CR60B is available in single-phase (S) and three-phase (T) versions at 200 V. CR300B is three-phase 200 V.
| Part number | Model | Supply | Net weight (kg) | Notes |
|---|---|---|---|---|
| 210006883200 | CR16B | AC 100–240 V, single/three phase | 35 | Instruction manual English/Japanese |
| 210006883300 | CR30B | AC 100–240 V, single/three phase | 35 | Instruction manual English/Japanese |
| 210006883400 | CR60B-S | AC 200 V, single phase | 48 | Instruction manual English/Japanese |
| 210006883500 | CR60B-T | AC 200 V, three phase | 48 | Instruction manual English/Japanese |
| 210006883600 | CR300B | AC 200 V, three phase | 100 | Instruction manual English/Japanese |
LR Series — Multi-Stage Dry Roots Pumps (Standard)
The LR series covers pumping speeds from 60 to 3601 m³/h. Available in Run Mode 2 (factory-set) and Run Mode 3 (higher-speed mode). CE-marking versions are available for EU installation. Confirm the Run Mode configuration from the installed pump nameplate or service records before ordering.
| Part number | Model | Mode | CE | Net weight (kg) |
|---|---|---|---|---|
| 210005119700 | LR60 | Run Mode 2 | No | 170 |
| 210006279200 | LR60 | Run Mode 3 | No | 170 |
| 210006279300 | LR60 | Run Mode 2 | Yes | 170 |
| 210006279400 | LR60 | Run Mode 3 | Yes | 170 |
| 210005119900 | LR90 | Run Mode 2 | No | 240 |
| 210006280600 | LR90 | Run Mode 3 | No | 240 |
| 210006280700 | LR90 | Run Mode 2 | Yes | 240 |
| 210006280800 | LR90 | Run Mode 3 | Yes | 240 |
| 210005120100 | LR180 | Run Mode 2 | No | 343 |
| 210006282000 | LR180 | Run Mode 3 | No | 343 |
| 210006282100 | LR180 | Run Mode 2 | Yes | 343 |
| 210006282200 | LR180 | Run Mode 3 | Yes | 343 |
| 210006301200 | LR300 | Run Mode 2 | No | 251 |
| 210006301300 | LR300 | Run Mode 3 | No | 251 |
| 210006301400 | LR300 | Run Mode 2 | Yes | 251 |
| 210006301500 | LR300 | Run Mode 3 | Yes | 251 |
| 210006784200 | LR421 | Run Mode 2 | No | 415 |
| 210006784500 | LR421-T | Run Mode 2 | No | 415 |
| 210006784600 | LR421-T | Run Mode 3 | No | 415 |
| 210006304400 | LR600 | Run Mode 2 | No | 371 |
| 210006304500 | LR600 | Run Mode 3 | No | 371 |
| 210006304600 | LR600 | Run Mode 2 | Yes | 371 |
| 210006304700 | LR600 | Run Mode 3 | Yes | 371 |
| 210006307600 | LR1200 | Run Mode 2 | No | 403 |
| 210006307700 | LR1200 | Run Mode 3 | No | 403 |
| 210006307800 | LR1200 | Run Mode 2 | Yes | 403 |
| 210006307900 | LR1200 | Run Mode 3 | Yes | 403 |
| 210006310800 | LR1800 | Run Mode 2 | No | 553 |
| 210006310900 | LR1800 | Run Mode 3 | No | 553 |
| 210006311000 | LR1800 | Run Mode 2 | Yes | 553 |
| 210006311100 | LR1800 | Run Mode 3 | Yes | 553 |
| 210006785100 | LR3601-T | Run Mode 2 | No | 720 |
| 210006785200 | LR3601-T | Run Mode 3 | No | 720 |
| 210006785500 | LR3601-TT | Run Mode 2 | No | 720 |
| 210006785600 | LR3601-TT | Run Mode 3 | No | 720 |
| 210006786300 | LR3601-TR | Run Mode 2 | No | 720 |
| 210006786400 | LR3601-TR | Run Mode 3 | No | 720 |
| 210006786700 | LR3601-TTR | Run Mode 2 | No | 720 |
| 210006786800 | LR3601-TTR | Run Mode 3 | No | 720 |
HR Series — High-Purity Multi-Stage Dry Roots Pumps
The HR series is designed for process applications requiring reduced contamination risk. HR300, HR600, and HR1200 are available with or without a mechanical booster pump heater. Confirm whether the MBP heater option is installed before ordering a replacement heater or scheduling service.
| Part number | Model | Mode | CE | MBP Heater | Net weight (kg) |
|---|---|---|---|---|---|
| 210005119800 | HR60 | Run Mode 3 | No | — | 170 |
| 210006283000 | HR60 | Run Mode 3 | Yes | — | 170 |
| 210005120000 | HR90 | Run Mode 3 | No | — | 240 |
| 210006283600 | HR90 | Run Mode 3 | Yes | — | 240 |
| 210006312800 | HR300 | Run Mode 3 | No | Included | 251 |
| 210006313000 | HR300 | Run Mode 3 | No | Included (with chassis exhaust) | 251 |
| 210006313600 | HR300 | Run Mode 3 | No | Not included | 251 |
| 210006313700 | HR300 | Run Mode 3 | Yes | Not included | 251 |
| 210006314400 | HR600 | Run Mode 3 | No | Included | 371 |
| 210006314500 | HR600 | Run Mode 3 | Yes | Included | 371 |
| 210006315200 | HR600 | Run Mode 3 | No | Not included | 371 |
| 210006315300 | HR600 | Run Mode 3 | Yes | Not included | 371 |
| 210006316000 | HR1200 | Run Mode 3 | No | Included | 403 |
| 210006316100 | HR1200 | Run Mode 3 | Yes | Included | 403 |
| 210006316800 | HR1200 | Run Mode 3 | No | Not included | 403 |
| 210006316900 | HR1200 | Run Mode 3 | Yes | Not included | 403 |
UR Series — Ultra-Clean Multi-Stage Dry Roots Pumps
| Part number | Model | Voltage | Mode | Net weight (kg) |
|---|---|---|---|---|
| 210006787000 | UR421-T | 200 V | Run Mode 3 | 415 |
| 210006787600 | UR1800 | 200 V | Run Mode 3 | 545 |
| 210006787800 | UR3601-TT | 200 V | Run Mode 3 | 720 |
GR Series — Next-Generation Multi-Stage Dry Roots Pumps
| Part number | Model | Supply | Motor | Net weight (kg) |
|---|---|---|---|---|
| 210006888000 | GR60A | Multiple voltage | Totally enclosed, external fan, IE3 | 128 |
| 210006888200 | GR90A | Multiple voltage | Totally enclosed, external fan, IE3 | 188 |
| 210006888400 | GR180A | Multiple voltage | Totally enclosed, external fan, IE3 | 268 |
MD1 — Diaphragm Pump
| Part number | Model | Origin | Net weight (kg) | Notes |
|---|---|---|---|---|
| 200001935500 | MD1 | Germany | 8 | Compact, oil-free diaphragm type |
| 200003525300 | MD1 maintenance kit | Japan | 1 | Spare parts kit for MD1 diaphragm pump |
Dry Pump Accessories
| Part number | Model / description | Specification |
|---|---|---|
| 200009441500 | Purge gas unit (manual) | Manual regulator type. For LS120, LS300, LS600, LS1200 |
| 200009441600 | Purge gas unit (automatic) | Solenoid valve type. For LS120, LS300, LS600, LS1200 |
| 200009146400 | Fan unit for air cooling | For UTM300B. DC 24 V. Side installation. |
| 200009461000 | Fan unit for air cooling | For UTM70B. DC 24 V. Side installation. |
| 200009461100 | Fan unit for air cooling | For UTM70B. DC 24 V. Bottom installation. |
| 200009461400 | Purge gas unit | For YTP70A-D |
Model Designation Decoder
For LS series: the model code structure is LS[size]A-[type]-[seal/voltage code]-[options]. Type C = C-type inlet flange; Type L = L-type inlet flange. Third field: 2x = FKM seal (21 = 200 V, 22 = 400 V); 4x = FFKM seal (41 = 200 V, 42 = 400 V).
For LR/HR/UR series: Run Mode 2 = lower-speed, lower-power operation mode. Run Mode 3 = higher-speed, maximum throughput mode. Mode is factory-set and documented in the supplied instrument manual. Contact us to verify the current mode from your serial number if the manual is unavailable.
Installation Requirements
- Foundation: Level, rigid, vibration-damped base. Confirm anchor-bolt pattern from the pump installation drawing. LR/HR/UR/GR series from 300 m³/h and above typically require floor anchoring.
- Transport locks: Remove all transport locking devices, plugs, and blanks before operation. Verify the pump turns freely by hand (where applicable) before first electrical start.
- Inlet protection: Install a particulate inlet screen or filter appropriate for the process on any pump that has operated in a particle-generating process.
- Exhaust piping: Maximum allowable exhaust back pressure depends on the model. Do not connect multiple pumps to a common exhaust manifold without calculating total back pressure. The exhaust must be routed to an approved extraction system where process gases require it.
- Nitrogen purge: LS series and CR series support purge gas connection for use with condensable or corrosive process gases. Connect the purge unit before starting the pump on such processes.
- Motor rotation: Three-phase models require correct phase rotation. Confirm rotation direction before first start using a brief (<1 second) uncoupled energization and observing rotation direction.
- Cooling: LS, LR, HR, UR, and GR series are air-cooled by internal fans. Ensure adequate ventilation around the pump casing. GR series has a totally enclosed external fan motor.
Commissioning Sequence
- Confirm model designation and voltage against facility supply.
- Verify all transport locks and shipping plugs are removed.
- Confirm all piping connections are correct, clean, and leak-tight.
- Check purge gas supply (if fitted) before first start on condensable or corrosive processes.
- Energize the pump and immediately observe for abnormal vibration, noise, or overtemperature alarm.
- Allow pump to reach operating temperature (typically 20–40 minutes for multi-stage Roots types, variable for scroll).
- Measure ultimate pressure at the pump inlet using a calibrated Pirani gauge. Compare with the published value for the model and mode.
- Check the exhaust piping for excessive back pressure.
- Measure motor current and compare with the nameplate value.
- Record all values in the commissioning report.
Preventive Maintenance
- Inspect the inlet screen or filter at intervals appropriate for the process loading.
- Check the exhaust silencer or mist separator condition.
- Verify the purge gas supply (where fitted) is flowing at the specified rate.
- Monitor motor current trend for gradual increase, which may indicate bearing or seal wear.
- Inspect all electrical connectors, interlock circuits, and remote-control wiring.
- Perform a pumping-speed or ultimate-pressure test at regular intervals and record the result.
- For CR series scroll pumps: the tip seal and orbital scroll are wear items and require replacement at intervals specified in the service manual. Contact us with the pump model, serial number, and current operating hours to determine whether a tip seal replacement is due.
- For LS series: seals, bearings, and drive components require factory or authorized overhaul. Pumping-chamber components are dry and require no oil, but contamination by process by-products requires cleaning of internal surfaces.
Common Symptoms and Diagnostic Guidance
| Symptom | Possible causes | Action |
|---|---|---|
| Cannot reach ultimate pressure | Inlet vacuum leak; contaminated pumping chamber; worn tip seal (CR series); incorrect Run Mode | Perform inlet blank-off test. Verify mode. Contact us with model, serial number, and measured pressure. |
| High motor current | Excess exhaust back pressure; process gas condensation in pumping chamber; worn bearings; three-phase phase loss | Measure exhaust pressure; check purge flow; contact service. |
| Abnormal vibration or noise | Loose mounting; bearing wear; foreign-body ingestion; scroll contact (CR series) | Immediately shut down. Do not restart until cause is identified. Contact service. |
| Overtemperature alarm | Insufficient ventilation; blocked cooling air path; high process gas load; exhaust restriction | Verify ventilation clearances; clean cooling paths; measure exhaust back pressure. |
| Gas ballast required | Condensable vapour from process causing oil emulsification (note: pumping chambers are dry, but bearing lubrication oil may be affected in some models) | Confirm purge gas is correctly installed and flowing. |
Repair and Workshop Service
ULVAC dry vacuum pumps require a qualified service workshop for internal overhaul. Self-repair of screw, Roots, or scroll pump internals is not recommended without proper tooling, clearance gauges, and trained personnel. We provide depot service for all LS, CR, LR, HR, UR, and GR series pumps. Provide the exact model designation, part number, serial number, current operating hours, process gases, and description of fault when requesting a service quotation.
Enquire About Service or Replacement
Email: mail@ulvacheliot.com
Provide: exact part number, model designation, serial number, supply voltage, current operating hours, process gases, contamination history, fault description.
Oil Rotary Vacuum Pumps | Mechanical Booster Pumps | Turbomolecular Pumps | Services
Operator and Maintenance Training
Operator training: daily startup and shutdown sequences for LS/LR/HR/UR/GR and CR scroll pumps; reading pump controller status indicators and alarm codes; gas purge indicator checks; safe venting and re-pump procedures; log-keeping; when to escalate to maintenance engineer.
Preventive maintenance training: gas purge kit filter replacement and flow rate verification; inlet filter inspection and replacement; tip seal condition assessment for CR series scroll pumps; controller parameter review and firmware version logging; performance trending by ultimate pressure comparison; spare parts identification by part number.
Commissioning training: mechanical installation requirements; exhaust routing; purge gas connection and flow setting; controller wiring including relay outputs, RS232/485 interface, and Profibus address configuration; pump-down sequence and ultimate pressure acceptance test; first-run checklist and data recording.
Fault diagnosis training: systematic isolation of pump, pipework, chamber, or gauge faults; pressure rise rate measurement; dry pump controller alarm code interpretation; purge system flow diagnosis; remote vs on-site escalation criteria. Contact mail@ulvacheliot.com — provide: pump models at site, number of attendees, roles (operator/maintenance/process engineer), site location.