ULVAC Vacuum Gauges — Service, Commissioning, and Spare Parts
ULVAC vacuum gauges cover atmospheric pressure to extreme-high-vacuum levels. Types include Pirani, atmospheric Pirani, multi-ionization (Pirani + hot-cathode), cold-cathode, metal ionization, and ceramic capacitance manometers. Confirm the gauge covers the required pressure range and is compatible with the intended controller before ordering.
Pirani Vacuum Gauges
Pirani gauges measure pressure via thermal conductivity — suitable from atmospheric to approximately 0.01 Pa. The GP-1G and SPU sensor heads work with the ISG1 display unit. Reading is referenced to nitrogen — apply gas-correction factors for other species.
| Part Number | Model | Specification |
|---|---|---|
| 210005153900 | GP-1G, Pa | Main body only |
| 210005154000 | GP-1G, Pa | w/WP-01, GP-H, |
| 210005154100 | GP-1G, Pa | w/WP-02, GP-H, |
| 210005154200 | GP-1G, Pa | w/WP-03, GP-H, |
| 210005154400 | GP-1G, Pa | w/WP-16, GP-H, |
| 210005154800 | GP-1G, Pa | w/GP-BH, WPB-10-034, Convertor cable |
| 210005155000 | GP-1G, Torr | Main body only |
| 210005155100 | GP-1G, Torr | w/WP-01, GP-H, |
| 210005155200 | GP-1G, Torr | w/WP-02, GP-H, |
| 210005155300 | GP-1G, Torr | w/WP-03, GP-H, |
| 210005155500 | GP-1G, Torr | w/WP-16, GP-H, |
| 210005155900 | GP-1G, Torr | w/GP-BH, WPB-10-034, Convertor cable |
| 210005156100 | GP-1G, Pa with case | Main body only |
| 210005156200 | GP-1G, Pa with case | w/WP-01, GP-H, |
| 210005156300 | GP-1G, Pa with case | w/WP-02, GP-H, |
| 210005156400 | GP-1G, Pa with case | w/WP-03, GP-H, |
| 210005156600 | GP-1G, Pa with case | w/WP-16, GP-H, |
| 210005157000 | GP-1G, Pa with case | w/GP-BH, WPB-10-034, Convertor cable |
| 210005157200 | GP-1G, Torr with case | Main body only |
| 210005157300 | GP-1G, Torr with case | w/WP-01, GP-H, |
| 210005157400 | GP-1G, Torr with case | w/WP-02, GP-H, |
| 210005157500 | GP-1G, Torr with case | w/WP-03, GP-H, |
| 210005157700 | GP-1G, Torr with case | w/WP-16, GP-H, |
| 210005158100 | GP-1G, Torr with case | w/GP-BH, WPB-10-034, Convertor cable |
| 210005158400 | GP-1GRY A type, Pa | Control box/meter only w/1M cable in-between |
| 210005158500 | GP-1GRY A type, Pa | w/WP-01, GP-H, |
| 210005158600 | GP-1GRY A type, Pa | w/WP-02, GP-H, |
| 210005158700 | GP-1GRY A type, Pa | w/WP-03, GP-H, |
| 210005158900 | GP-1GRY A type, Pa | w/WP-16, GP-H, |
| 210005159300 | GP-1GRY A type, Pa | w/GP-BH, WPB-10-034, Convertor cable |
| 210005159500 | GP-1GRY A type, Pa/Torr | Only body and meter |
| 210005159600 | GP-1GRY A type, Pa/Torr | w/WP-01, GP-H, |
| 210005159700 | GP-1GRY A type, Pa/Torr | w/WP-02, GP-H, |
| 210005159800 | GP-1GRY A type, Pa/Torr | w/WP-03, GP-H, |
| 210005160000 | GP-1GRY A type, Pa/Torr | w/GP-H, WP-16 , Torr |
| 210005160400 | GP-1GRY A type, Pa/Torr | w/GP-BH, WPB-10-034, Convertor cable, , Torr |
| 210005149200 | GP-1000G, Pa | Main body only |
| 210005149300 | GP-1000G, Pa | w/GP-H, WP-01 |
| 210005149400 | GP-1000G, Pa | w/GP-H, WP-02 |
| 210005149500 | GP-1000G, Pa | w/GP-H, WP-03 |
Atmospheric Pirani Gauges (SW1 and ISG1 Package)
SW1 series gauges extend Pirani measurement to atmospheric and slightly above-atmospheric conditions, used for foreline monitoring, roughing lines, and load-lock pressure monitoring. Confirm the connection fitting (KF/NW or R1/8 thread) and cable length when ordering.
| Part Number | Model | Specification |
|---|---|---|
| 210006347101 | SW1-1 | w/SWP-16 (NW16) |
| 210006850100 | SW1-1 | SWP-R1/8 (R1/8) |
| 210006899000 | SW1-1 | with SWP-1S (Sanitary type) |
| 210006910700 | SW1-1F | SWP-16,Dsub15-LAN connector |
| 210006347301 | SW1-2 | w/SWP-16 (NW16) |
| 210006850200 | SW1-2 | SWP-R1/8 (R1/8) |
| 210006905300 | SW1-2C | SWP-R1/8 (R1/8), communication type, successor model of BPR2, checksum off |
| 210006347901 | SW1 & ISG1 package | SWP-16, Cable 2m, DIN, AC100-240V |
| 210006348001 | SW1 & ISG1 package | SWP-16, Cable 5m, DIN, AC100-240V |
| 210006348101 | SW1 & ISG1 package | SWP-16, Cable 10m, DIN, AC100-240V |
| 210006348201 | SW1 & ISG1 package | SWP-16, Cable 15m, DIN, AC100-240V |
| 210006348301 | SW1 & ISG1 package | SWP-16, Cable 20m, DIN, AC100-240V |
| 210006348401 | SW1 & ISG1 package | SWP-16, Cable 25m, DIN, AC100-240V |
| 210006348501 | SW1 & ISG1 package | SWP-16, Cable 30m, DIN, AC100-240V |
| 210006349301 | SW1 & ISG1 package | SWP-16, Cable 2m, DC24V |
| 210006349401 | SW1 & ISG1 package | SWP-16, Cable 5m, DC24V |
| 210006349501 | SW1 & ISG1 package | SWP-16, Cable 10m, DC24V |
| 210006349601 | SW1 & ISG1 package | SWP-16, Cable 15m, DC24V |
| 210006349701 | SW1 & ISG1 package | SWP-16, Cable 20m, DC24V |
| 210006349801 | SW1 & ISG1 package | SWP-16, Cable 25m, DC24V |
| 210006349901 | SW1 & ISG1 package | SWP-16, Cable 30m, DC24V |
| 210006348601 | SW1 & ISG1 package | SWP-16, Cable 2m, AC100-240V |
| 210006348701 | SW1 & ISG1 package | SWP-16, Cable 5m, AC100-240V |
| 210006348801 | SW1 & ISG1 package | SWP-16, Cable 10m, AC100-240V |
| 210006348901 | SW1 & ISG1 package | SWP-16, Cable 15m, AC100-240V |
| 210006349001 | SW1 & ISG1 package | SWP-16, Cable 20m, AC100-240V |
| 210006349101 | SW1 & ISG1 package | SWP-16, Cable 25m, AC100-240V |
| 210006349201 | SW1 & ISG1 package | SWP-16, Cable 30m, AC100-240V |
| 210006350001 | SW1 & ISG1 package | SWP-16, Cable 2m, DC24V |
| 210006350101 | SW1 & ISG1 package | SWP-16, Cable 5m, DC24V |
Multi-Ionization Gauges (ST2 Series)
ST2 series gauges combine Pirani and hot-cathode ionization in one sensor head, providing seamless measurement from atmospheric to high-vacuum. ST2-1 is standard; ST2-2 adds RS232C communication. Do not energize the hot-cathode element above the maximum permissible pressure — filament failure will result.
| Part Number | Model | Specification |
|---|---|---|
| 210006861000 | ST2-1 | standard, w/SWT-16(NW-16) |
| 210006877600 | ST2-1 | standard, w/SWT-25(NW-25) |
| 210006860000 | ST2-1 | standard, sensor unit only |
| 210006861100 | ST2-2 | communication type, w/SWT-16(NW-16) |
| 210006860100 | ST2-2 | communication type, sensor unit only |
| 210006861200 | ST2-1 | standard, w/SWT-16,WP-16&unit cable0.5m |
| 210006861300 | ST2-1 | standard, w/SWT-16,WP-16&unit cable1m |
| 210006861400 | ST2-1 | standard, w/SWT-16,WP-16&unit cable2m |
| 210006861500 | ST2-2 | communication type, w/SWT-16,WP-16&unit cable 0.5m |
| 210006861600 | ST2-2 | communication type, w/SWT-16,WP-16&unit cable 1m |
| 210006861700 | ST2-2 | communication type, w/SWT-16,WP-16&unit cable 2m |
| 210006877800 | ST2-1 | standard, w/SWT-25,WP-16&unit cable0.5m |
| 210006877900 | ST2-1 | standard, w/SWT-25,WP-16&unit cable1m |
| 210006878000 | ST2-1 | standard, w/SWT-25,WP-16&unit cable2m |
| 210006878100 | ST2-2 | communication type, w/SWT-25,WP-16&unit cable 0.5m |
| 210006878200 | ST2-2 | communication type, w/SWT-25,WP-16&unit cable 1m |
| 210006878300 | ST2-2 | communication type, w/SWT-25,WP-16&unit cable 2m |
| 210006861800 | ST2-1 | standard, w/SWT-16,WP-16&unit cable0.5m 2pcs. |
| 210006861900 | ST2-2 | communication type, w/SWT-16,WP-16&unit cable 0.5m 2pcs. |
| 210006878400 | ST2-1 | standard, w/SWT-25,WP-16&unit cable0.5mx2 |
| 210006878500 | ST2-2 | communication type, w/SWT-25,WP-16&unit cable 0.5mx2 |
| 210006862000 | ST2&ISG1 | cable 2m, DIN, AC100-240V |
| 210006862100 | ST2&ISG1 | cable 5m, w/SWT-16(NW-16) DIN, AC100-240V |
| 210006862200 | ST2&ISG1 | cable 10m, w/SWT-16(NW-16) DIN, AC100-240V |
| 210006862300 | ST2&ISG1 | cable 15m, w/SWT-16(NW-16) DIN, AC100-240V |
| 210006862400 | ST2&ISG1 | cable 20m, w/SWT-16(NW-16) DIN, AC100-240V |
| 210006862500 | ST2&ISG1 | cable2m, w/SWT-16(NW-16) DIN, DC24V |
| 210006862600 | ST2&ISG1 | cable5m, w/SWT-16(NW-16) DIN, DC24V |
| 210006862700 | ST2&ISG1 | cable10m, w/SWT-16(NW-16) DIN, DC24V |
| 210006862800 | ST2&ISG1 | cable15m, w/SWT-16(NW-16) DIN, DC24V |
| 210006862900 | ST2&ISG1 | cable20m, w/SWT-16(NW-16) DIN, DC24V |
| 210006878600 | ST2-1&ISG1 | cable 2m, w/SWT-25(NW-25) DIN, AC100-240V |
| 210006878700 | ST2-1&ISG1 | cable 5m, w/SWT-25(NW-25) DIN, AC100-240V |
| 210006878800 | ST2-1&ISG1 | cable 10m, w/SWT-25(NW-25) DIN, AC100-240V |
| 210006878900 | ST2-1&ISG1 | cable 15m, w/SWT-25(NW-25) DIN, AC100-240V |
| 210006879000 | ST2-1&ISG1 | cable 20m, w/SWT-25(NW-25) DIN, AC100-240V |
| 210006879100 | ST2-1&ISG1 | cable2m, w/SWT-25(NW-25) DIN, DC24V |
| 210006879200 | ST2-1&ISG1 | cable5m, w/SWT-25(NW-25) DIN, DC24V |
| 210006879300 | ST2-1&ISG1 | cable10m, w/SWT-25(NW-25) DIN, DC24V |
| 210006879400 | ST2-1&ISG1 | cable15m, w/SWT-25(NW-25) DIN, DC24V |
Ceramic Capacitance Manometers (CCMT Series)
CCMT series manometers use a ceramic diaphragm capacitor — gas-species independent, suitable for process control. Available in 1D, 10D, 100D, 1000D full-scale ranges. Connections: 1/2-inch pipe, KF-16, or VCR-8. Controllers: GM-2001, GM-2002. Allow full warm-up before use.
| Part Number | Model | Specification |
|---|---|---|
| 210006397900 | CCMT-1000D-1/2 | φ12.7 pipe end |
| 210006398100 | CCMT-1000D-N16 | KF-16 |
| 210006398200 | CCMT-1000D-VCR | Cajon8VCR |
| 210006398400 | CCMT-100D-1/2 | φ12.7 |
| 210006398600 | CCMT-100D-N16 | KF-16 |
| 210006398700 | CCMT-100D-VCR | Cajon8VCR |
| 210006398900 | CCMT-10D-1/2 | φ12.7 |
| 210006399100 | CCMT-10D-N16 | KF-16 |
| 210006399200 | CCMT-10D-VCR | Cajon8VCR |
| 210006399400 | CCMT-1D-1/2 | φ12.7 pipe end |
| 210006399600 | CCMT-1D-N16 | KF-16 |
| 210006399700 | CCMT-1D-VCR | Cajon8VCR |
| 210004464600 | GM-2001 | Main unit only |
| 210004464700 | GM-2002 | Main unit only |
UHV and Extreme-High-Vacuum Gauges
Metal ionization gauges and the AxTRAN ISX2 Extreme High Vacuum Gauge measure below 10⁻⁶ Pa. These require sensor degassing in UHV conditions. Contact us with the required pressure range, mounting requirements, and controller model when enquiring.
Service Enquiry
Email: mail@ulvacheliot.com
Provide: gauge model, part number, controller model, cable model, serial number, measured pressure, and symptom description.