ULVAC HELIOT 900 PASS result on Ultra Flow test — leak rate below setpoint with green PASS indicator

Vacuum Method Helium Leak Testing

The vacuum method (also called the evacuation method) is the most sensitive and most widely used mode of helium mass spectrometer leak testing. The test object is evacuated and connected to the leak detector inlet. Helium tracer gas is applied to the outside of the test object. Any helium that passes through a leak in the test object’s wall is drawn into the leak detector, ionised, and measured by the mass spectrometer.

How the Vacuum Method Works

Test Setup

  1. Connect the HELIOT inlet (NW25) to the test object via appropriate vacuum fittings.
  2. Start the instrument and allow pump-down to the required test mode pressure.
  3. With test object evacuated, spray or flood the outside with helium tracer gas.
  4. Monitor the HELIOT display for leak rate signal.
  5. Localise leaks by probing small areas at a time with directed helium spray.

Three Sub-Modes (HELIOT 900 Series)

ModeMax inlet pressureHe pumping speedBest sensitivity
ULTRA flow<2 Pa (0.02 mbar)5 L/s<5×10⁻¹³ Pa·m³/s
FINE flow<100 Pa (1 mbar)1 L/s~10⁻¹² Pa·m³/s
GROSS flow<1,200 Pa (12 mbar)~10⁻¹° Pa·m³/s

Advantages of the Vacuum Method

  • Highest sensitivity: <5×10⁻¹³ Pa·m³/s detectable in ULTRA flow mode — the most sensitive standard industrial leak testing method
  • Quantitative measurement: the displayed value is the actual leak rate in Pa·m³/s (or mbar·L/s); direct comparison to acceptance criteria
  • Localisation: by probing small areas of the test object surface, the exact position of a leak can be found
  • Multiple leaks: all leaks in the test object contribute to the total reading; individual leaks can be localised after the total is measured
  • Helium selectivity: the 90° magnetic deflection mass spectrometer responds only to mass 4 (helium) or mass 2 (hydrogen); no interference from ambient air or process gases

Applications

ApplicationTypical acceptance leak rateRecommended mode
Automotive fuel system components10⁻¹° to 10⁻¹¹ Pa·m³/sULTRA flow
Air conditioning and refrigeration (HVAC)10⁻¹° to 10⁻¹² Pa·m³/sULTRA or FINE flow
Vacuum vessels and chambers10⁻¹° to 10⁻¹² Pa·m³/sULTRA flow
Heat exchangers10⁻¹° to 10⁻¹² Pa·m³/sULTRA flow (individual tubes)
Semiconductor process chambers10⁻¹² to 10⁻¹⁴ Pa·m³/sULTRA flow
Scientific instruments10⁻¹³ to 10⁻¹ᯬ Pa·m³/sULTRA flow
Cryogenic equipment10⁻¹⁴ to 10⁻¹⁶ Pa·m³/sULTRA flow
Packaging integrity (large leak)10⁻⁶ to 10⁻⁹ Pa·m³/sGROSS flow

Requirements for the Vacuum Method

  • Test object must withstand internal vacuum: the part must not collapse, deform, or be damaged when evacuated to the required inlet pressure (2 Pa for ULTRA flow, 100 Pa for FINE flow)
  • Test object must be evacuable in reasonable time: very large internal volumes slow pump-down. Choose the HELIOT model with the appropriate backing pump capacity for the expected volume.
  • Helium access to external surfaces: all external surfaces must be accessible for helium application. For complex geometries, a test enclosure (hood test) may be required.
  • Acceptable background helium: if the work environment contains high ambient helium concentration (e.g., from nearby helium use or inadequate ventilation), background signal may interfere. Ventilate the test area.

Test Enclosure (Hood Test)

For test objects where spraying helium on individual surfaces is impractical (complex geometry, large surface area), the entire test object is enclosed in a bag, tent, or rigid hood that is filled with helium. The total integral leak rate of all leaks is measured. This method is faster for production testing but does not localise individual leaks. It is often used as a first-pass total-leakage check; an object that fails the hood test is then probed with directed spray to find the leak location.

We Provide

  • On-site commissioning of HELIOT instruments for vacuum method test applications
  • Test method validation support: selecting acceptance limits, test mode, and procedure for your application
  • Operator training for vacuum method testing
  • Preventive maintenance and calibration to maintain vacuum method test integrity

Email: mail@ulvacheliot.com

Helium Leak Testing Guide | Sniffer Method | Calibration | HELIOT 900 Series

Independent HELIOT Equipment Service

Independent third-party maintenance, commissioning and training provider for ULVAC HELIOT helium mass spectrometer leak detectors. We are not the manufacturer and do not sell new ULVAC equipment. Worldwide on-site support.

mail@ulvacheliot.com


Independent service provider notice: This website is operated by an independent, third-party technical service organisation. We provide on-site and remote maintenance, commissioning, repair and training services for existing ULVAC HELIOT equipment already owned or procured by our customers. We are not ULVAC Corporation, not a subsidiary, dealer, distributor, or authorised representative of ULVAC Corporation, and we do not sell new ULVAC equipment. ULVAC® and HELIOT® are registered trademarks of ULVAC Corporation (Japan), used here solely in a descriptive, nominative sense to identify the equipment we service. | Full Trademark Disclaimer | Contact